منابع مشابه
C-MEMS and C-NEMS
Our work in carbon-microelectromechanical systems (C-MEMS) suggests that C-MEMS might provide a very interesting material and microfabrication solution to the battery miniaturization problem, active DNA arrays and a wide variety of chemical and biological sensors. We established that it is possible to use C-MEMS to create very high aspect ratio carbon structures (e.g. posts with an aspect ratio...
متن کاملFrom MEMS to NEMS with carbon.
Our work in carbon-microelectromechanical systems (C-MEMS) suggests that C-MEMS might provide a very interesting material and microfabrication approach to battery miniaturization, active DNA arrays and a wide variety of chemical and biological sensors. In C-MEMS, photoresist is patterned by photolithography and subsequently pyrolyzed at high-temperatures in an oxygen-free environment. We establ...
متن کاملFIB/SEM technology in NEMS/MEMS fabrication and investigation
FEI Helios NanoLab 600i microscope with Kleindiek MM3A-EM micromanipulators, controlled by microscope PC connected to Keithley 2400 Source Meter, has been used in our experiments. Due to limited space only several examples of FIB/SEM processes that have been conducted are presented here. They proof the great advantage of this technology in modifying single structures in short time. Streszczenie...
متن کاملUltrananocrystalline and Nanocrystalline Diamond Thin Films for MEMS/NEMS Applications
Anirudha V. Sumant, Orlando Auciello, Robert W. Carpick, Sudarsan Srinivasan, and James E. Butler of smooth diamond films with uniform thickness and micro/nanostructure over large area substrates (≥150 mm diameter wafer), as recently demonstrated.1 Growth of thin (0.1 to 5 micron thick) diamond films on nondiamond substrates, typically conventional electronic substrates such as Si, SiC, and AlN...
متن کاملMEMS/NEMS Dynamics Measurement Tool Using The Stroboscopic Principle
High resolution and noncontacted measurement tools for the dynamic characterization of micro devices are necessary to develop high performance/precision and reliable microelectromechanical systems (MEMS). In this paper, a three-dimensional dynamic measurement system based on stroboscopic and interferometric methods is presented. This system can capture bright-fielded and interferometric images ...
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ژورنال
عنوان ژورنال: MRS Bulletin
سال: 2016
ISSN: 0883-7694,1938-1425
DOI: 10.1557/mrs.2016.2